5 October 2000 Novel pressure sensor with a Fabry-Perot interferometer
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Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401773
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
A novel pressure sensor using a fiber Fabry-Perot interferometer (FFPI) has been developed in this paper. We use the internal F-P cavity pressure sensor in our research. Micromachined Fabry-Perot microcavity structures have been investigated for use as a pressure sensor. The single-mode fiber containing the interferometer is bonded at one end to the stainless-steel diaphragm and is also attached under longitudinal tension beyond the interferometer. An analysis relating the expected interferometer phase change to pressure is presented. And the dynamic response of FFPI sensor to pressure changes produced by an air pump is in good agreement with that measured with a conventional pressure sensor. The sensor is suitable for operation with other signal-processing and multiplexing schemes.
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Zhiquan Li, Zhiquan Li, Lina Fan, Lina Fan, Xifu Qiang, Xifu Qiang, "Novel pressure sensor with a Fabry-Perot interferometer", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401773; https://doi.org/10.1117/12.401773
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