5 October 2000 Succinct design method of soft x-ray multilayer mirror
Author Affiliations +
Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401778
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
In order to acquire high reflectance, how to select the thickness dH and dL of the high and low atomic numbers materials should be considered first of all in the design of soft x-ray multi-layer. This paper introduced a simple design method based on matrix method. In the design process of a multi-layer mirror using Mo/Si at (lambda) equals 13.1 nm and normal incidence, its reflectance reaches 67.0 percent when layers are 30. Compared with other method, although its reflectance is a bit lower, it is a simple and practical method.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Li-Min Song, Li-Min Song, Jia-sheng Hu, Jia-sheng Hu, "Succinct design method of soft x-ray multilayer mirror", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401778; https://doi.org/10.1117/12.401778
PROCEEDINGS
4 PAGES


SHARE
Back to Top