11 October 2000 Nanometer indicating system based on surface plasma wave
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Proceedings Volume 4224, Biomedical Photonics and Optoelectronic Imaging; (2000) https://doi.org/10.1117/12.403919
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
A new method for nanometer positioning based on surface plasma wave is reported. A fiber probe approaching a coated prism can be equivalent to a four-layer prism-metal-air- fiber system. Analysis of the near-field beam intensity entering the fiber probe is presented. Theoretical analysis shows that the intensity coupling into the fiber probe changes according to the thickness of air gap. Non-contact nanometer indicating system can be set up according to this characteristic. Experiments show that standard deviation of 2nm and resolution of 0.1nm/nV of positioning repeatability can be achieved under air conditions of +/- 1 degree(s)C/h.
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Jian Wu, Jian Wu, Chunyong Yin, Chunyong Yin, Jihua Guo, Jihua Guo, } "Nanometer indicating system based on surface plasma wave", Proc. SPIE 4224, Biomedical Photonics and Optoelectronic Imaging, (11 October 2000); doi: 10.1117/12.403919; https://doi.org/10.1117/12.403919
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