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Fabrication of diffractive micro-optical lens for integration with optoelectronic devices by direct laser writing
Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
Investigation of process latitude in e-beam lithography for positive CAR UVIII using novel volumetric linewidth measurement
Optimization of the planarizing performance of a DUV organic bottom antireflective coating for via first dual-damascene process: cooperation to achieve material and process characterization