20 October 2000 Fabrication of diffractive micro-optical lens for integration with optoelectronic devices by direct laser writing
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Proceedings Volume 4226, Microlithographic Techniques in Integrated Circuit Fabrication II; (2000) https://doi.org/10.1117/12.404841
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
Abstract
The optical performances of fabricated diffractive micro-optical lens are determined by some fabrication process parameters. These key fabrication parameters are found to be the laser intensity, the speed of the movable stages, the distance from the top surface of the photoresist to the UV objective lens, the starting laser intensity, the laser intensity variation step and the overlap of the adjacent patterns. In order to get the continuous-relief profile, a method was used to fabricate diffractive optical lens with any surface relief profile. Each zone of the diffractive micro-optical lens is divided and linewidth is achieved by changing the fabrication parameters. A computer control program has been developed to optimize the key fabrication parameters for fabricating the high quality continuous-relief diffractive micro- optical lens matched with design parameters. The fabricated lens has a focal length of 1.1 cm, which is very close to the design value of 1.0 cm.
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Chao Wang, Chao Wang, Yuen Chuen Chan, Yuen Chuen Chan, Yee Loy Lam, Yee Loy Lam, Liping Zhao, Liping Zhao, Yan Zhou, Yan Zhou, } "Fabrication of diffractive micro-optical lens for integration with optoelectronic devices by direct laser writing", Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); doi: 10.1117/12.404841; https://doi.org/10.1117/12.404841
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