20 October 2000 Linewidth control performance enhancement using novel compensation techniques for DUV scanners
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Proceedings Volume 4226, Microlithographic Techniques in Integrated Circuit Fabrication II; (2000) https://doi.org/10.1117/12.404854
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
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James G. Tsacoyeanes, James G. Tsacoyeanes, Pradeep K. Govil, Pradeep K. Govil, J. Christian Swindal, J. Christian Swindal, Keith W. Andresen, Keith W. Andresen, Javed Sumra, Javed Sumra, } "Linewidth control performance enhancement using novel compensation techniques for DUV scanners", Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); doi: 10.1117/12.404854; https://doi.org/10.1117/12.404854
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