Design considerations in micromachined silicon microphones

Jianmin Miao; Rongming Lin; Longqing Chen; Quanbo Zou; Sin Yee Lim; Suan Hee Seah

doi:10.1117/12.405427

24 October 2000 Design considerations in micromachined silicon microphones

Jianmin Miao, Rongming Lin, Longqing Chen, Quanbo Zou, Sin Yee Lim, Suan Hee Seah

Proceedings Volume 4228, Design, Modeling, and Simulation in Microelectronics; (2000) https://doi.org/10.1117/12.405427
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

We present and compare the different design of micromachined silicon condenser microphones. The aim is to develop the microphones with high sensitivity and low fabrication cost. Slotted and corrugated diaphragms have been designed and fabricated in order to increase the mechanical sensitivity of microphones. At the same time we developed the fabrication process for the low stress so stress-free multilayers polysilicon used as the microphone diaphragms. To increase the microphone chip density on one wafer and avoid the sticking problem during the wet release process, a new process design using deep reactive ion etching is prosed, such process system is available in our laboratory.

Citation Download Citation

Jianmin Miao, Rongming Lin, Longqing Chen, Quanbo Zou, Sin Yee Lim, and Suan Hee Seah "Design considerations in micromachined silicon microphones", Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); https://doi.org/10.1117/12.405427

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available