Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model

Dagmar Peters; Hilmar Bolte; Claudia Marschner; Sven Rehfuss; Rainer Laur

doi:10.1117/12.405438

24 October 2000 Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model

Dagmar Peters, Hilmar Bolte, Claudia Marschner, Sven Rehfuss, Rainer Laur

Author Affiliations +

Proceedings Volume 4228, Design, Modeling, and Simulation in Microelectronics; (2000) https://doi.org/10.1117/12.405438
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Membrane structures are one of the most common elements in microsystems. In order to be able to perform system simulations, behavioral models of their bending lines have to be developed. These models may also be used as a basis for parameter extractions which is a crucial task in the development of microsystems. But parameter extractions can only be performed, if the models used include all of the most important physical effects. Hence, the physical basis of these models has to be very profound.

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Dagmar Peters, Hilmar Bolte, Claudia Marschner, Sven Rehfuss, and Rainer Laur "Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model", Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); https://doi.org/10.1117/12.405438

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