20 October 2000 4x4 nonblocking matrix switch based on MOEMS
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Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404900
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
We present the design and characterization of a new 4 X 4 switch based on the previously developed 2 X 2 fiber switch. The switching principle uses plasma etched vertical mirrors that can be moved in and out of two pairs of optical fibers with the integrated electrostatic actuator. The 4 X 4 switch is built by connecting 16 individual 2 X 2 switches in a common package (100 X 50 X 35 mm). Instead of integrating the 16 switch elements on the same chip, we preferred assembling the switches by fusion splicing. The insertion loss is less than 1.8 dB for each state.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Laurent Dellmann, Laurent Dellmann, Cornel Marxer, Cornel Marxer, Nico F. de Rooij, Nico F. de Rooij, } "4x4 nonblocking matrix switch based on MOEMS", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404900; https://doi.org/10.1117/12.404900


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