20 October 2000 Dynamic characteristics measurement system for optical scanning micromirror
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Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404902
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
Abstract
This paper describes the development of a novel, flexible, with appropriate accuracy dynamic characteristics measurement system for optical scanning micromirror. With the system, we can measure dynamic behavior such as transient response, scan speed, scan angle, scan repeatability, and scan non-linearity of the canning micromirror devices. Moreover, the optical system performances such as scan spot size and even scan spot intensity can also be obtained.
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J.C. Chiou, J.C. Chiou, Yu-Chen Lin, Yu-Chen Lin, Yi-Cheng Chang, Yi-Cheng Chang, } "Dynamic characteristics measurement system for optical scanning micromirror", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404902; https://doi.org/10.1117/12.404902
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