20 October 2000 Frequency tunable micromachined rf oscillators
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Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404898
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
Abstract
High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significant factor in affecting the flat passband of the filter and will be further analyzed in this paper.
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Yee Chong Loke, Yee Chong Loke, Kim Miao Liew, Kim Miao Liew, Q. Zou, Q. Zou, Ai Qun Liu, Ai Qun Liu, } "Frequency tunable micromachined rf oscillators", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404898; https://doi.org/10.1117/12.404898
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