MEMS atomizer based on Rayleigh instability-driven breakup of filaments

Yen-Peng Kong; Francis E.H. Tay; Yuan Xu

doi:10.1117/12.404890

20 October 2000 MEMS atomizer based on Rayleigh instability-driven breakup of filaments

Yen-Peng Kong, Francis E.H. Tay, Yuan Xu

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404890
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

In this paper, simulation studies to determine the feasibility of producing filaments using `drop and demand' techniques are presented. These filaments will break up into droplets due to the phenomena caused by Rayleigh instability. In the biomedical applications, for effective pulmonary drug delivery of insulin, for example, the drug particles must be in the range of 1 to 5 microns in size. This stringent requirement is also encountered in gas flow seeding for Laser Doppler Velocimetry studies. A piezoelectrically actuated MEMS atomizer based on Rayleigh instability-driven break-up of filaments has been designed to meet this requirement. Although the formation of droplets from jets has been used extensively in ink-jet printing, the currently presented mode of droplet formulation has yet to be demonstrated in a MEMS device.

Citation Download Citation

Yen-Peng Kong, Francis E.H. Tay, and Yuan Xu "MEMS atomizer based on Rayleigh instability-driven breakup of filaments", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404890

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available