6 October 2000 Dual laser probe for testing surface roughness and microdisplacement
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402754
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
As a practical monitoring tool for measurements of surface roughness and micro-displacement, an optical implementation of the method based on light scattering for measuring surface roughness and optical triangulation for measuring micro- displacement is proposed. The technique enables evaluation of the surface roughness and micro-displacement of specimen by using only one device. The measuring principle and basic analysis applied in the design are described in detail, after which the validity of the principle is demonstrated by the results of experimental evaluations. Experimental results show that micro-displacement measuring linear range within ± 300 μm can be obtained for measurements of specimen of surface roughness with Ra from 0.005μm to 0.1 μm.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shihua Wang, Shihua Wang, Chongjiu Jin, Chongjiu Jin, Tao Zhang, Tao Zhang, Zhaofei Zhou, Zhaofei Zhou, } "Dual laser probe for testing surface roughness and microdisplacement", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402754; https://doi.org/10.1117/12.402754
PROCEEDINGS
7 PAGES


SHARE
Back to Top