6 October 2000 Fabrication of binary optical elements by thin film deposition
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402784
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
In this paper, the process of fabrication of binary optical elements by thin film deposition has been introduced. An eight-level phase microlens array has been fabricated with 20 X 20 rectangularly shaped microlenses, focal length of 100 mm and lens size of 0.8 mm for the wavelength of 0.6328 μm. Our measurements show that all the step heights are nearly identical and the controlled precision of step heights was better than 1 nm.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Huang, Wei Huang, Chongxi Zhou, Chongxi Zhou, Jin Zhu, Jin Zhu, Yundong Zhang, Yundong Zhang, "Fabrication of binary optical elements by thin film deposition", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402784; https://doi.org/10.1117/12.402784
PROCEEDINGS
3 PAGES


SHARE
RELATED CONTENT

Diffraction efficiency of binary optical elements
Proceedings of SPIE (April 30 1990)
Binary optics thin-film microlens array
Proceedings of SPIE (January 12 1993)
Binary Micro Optics: An Application To Beam Steering
Proceedings of SPIE (May 05 1989)
High-efficiency multiple phase level lenslet array
Proceedings of SPIE (January 12 1993)

Back to Top