6 October 2000 Fabrication of high-quality cavity mirror
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Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402763
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
The surface of K9 glass substrate whose size is 220x220x40mm3 is polished by bowl-feed polish with polishing agent of ultra pure water combined with cerium dioxide (CeO2). The super smooth surface with standard rms surface roughness less than 1 nm and reflective wavefront 0.127 λ(p-v) (λ=632.8 nm) was got. The high reflective thin film, whose reflectivity measured by Lambda 19 photometer is more than 99.5% at wavelength 1054 nm for incidence angle 0°, and whose laser induced damage threshold is 26 J/cm2 (1054 nm, 1 ns), was coated on this super smooth surface of K9 glass substrate by electronic beam evaporation deposition in the APS1504 coating machine. After alternately coating hafnia (HfO2) and silicon dioxide (SiO2) multilayer on the K9 glass substrate surface, this mirror's reflective wavefront is 0.17 λ(p-v) (λ=632.8 nm). The high quality cavity mirror was got.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiongying Fu, Xiongying Fu, Jianyong Wang, Jianyong Wang, Yuanan Zhao, Yuanan Zhao, Yuanyuan Gu, Yuanyuan Gu, Mincai Liu, Mincai Liu, Zhengxiu Fan, Zhengxiu Fan, "Fabrication of high-quality cavity mirror", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402763; https://doi.org/10.1117/12.402763


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