Fiber polarized-light interferometer for precise measurement

Hao Zhu; Qian Tian; Enyao Zhang; Tiejun Xu; Chengyin Yuan

doi:10.1117/12.402751

6 October 2000 Fiber polarized-light interferometer for precise measurement

Hao Zhu, Qian Tian, Enyao Zhang, Tiejun Xu, Chengyin Yuan

Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402751
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

A fiber polarized-light Interferometer for high precise measurement of fabrication is introduced in this paper. This is a novel fiber senior combined polarized-light interference technology and fiber sensor technology. The accuracy of this method is 10^-2 nm in theory. It is suitable to on-line non-contact measurement and monitor in the production procedure. The principle, research and analysis of experimental results of this interferometer are described.

Citation Download Citation

Hao Zhu, Qian Tian, Enyao Zhang, Tiejun Xu, and Chengyin Yuan "Fiber polarized-light interferometer for precise measurement", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402751

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