Paper
6 October 2000 Microlens array and application systems
Chunlei Du, Bo Chen, Chuankai Qiu, Linbo Bai, Qiling Deng, Chongxi Zhou, Lishu Zhou
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402781
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
Performances of diffractive and refractive microlens array have been studied and compared. Besides the diffractive microlens array which can be fabricated by means of the microfabrication technologies, method for manufacturing continuous profile refractive microlens array with larger sag depth has been developed for solving the unique problems like diode laser alignment. Both diffractive and refractive microlens array with different numerical aperture and other parameters are fabricated according to the application requirements, experimental results are given.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chunlei Du, Bo Chen, Chuankai Qiu, Linbo Bai, Qiling Deng, Chongxi Zhou, and Lishu Zhou "Microlens array and application systems", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402781
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Microlens array

Semiconductor lasers

Microlens

Photomasks

Infrared detectors

Sensors

Microfabrication

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