Translator Disclaimer
Paper
6 October 2000 Novel profilometer with dual digital length gauge for large aspheric measurements
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402789
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
Abstract
Three-dimensional or x-y-z profilometer is a well-established method for measuring non-symmetric aspherical surface. In this paper, the design of three-dimensional, x-θ -z profilometer called dual gauge profilometer (DGP), which uses a granite straight edge with high precision linearity as reference to reduce the linearity error of ball slide, is presented. The benefits of using this reference structure, data processing and error surface reconstruction are also discussed. Through the use of the novel profilometer, a non- symmetric off-axis mirror with 600 millimeter in diameter can be measured with accuracy of 4 microns Peak to Valley (PV) within 40 minutes, including data processing time.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quandou Wang, Zhongyu Zhang, Xuejun Zhang, and Jingchi Yu "Novel profilometer with dual digital length gauge for large aspheric measurements", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402789
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top