Novel profilometer with dual digital length gauge for large aspheric measurements

Quandou Wang; Zhongyu Zhang; Xuejun Zhang; Jingchi Yu

doi:10.1117/12.402789

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6 October 2000 Novel profilometer with dual digital length gauge for large aspheric measurements

Quandou Wang, Zhongyu Zhang, Xuejun Zhang, Jingchi Yu

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Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402789
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

Three-dimensional or x-y-z profilometer is a well-established method for measuring non-symmetric aspherical surface. In this paper, the design of three-dimensional, x-θ -z profilometer called dual gauge profilometer (DGP), which uses a granite straight edge with high precision linearity as reference to reduce the linearity error of ball slide, is presented. The benefits of using this reference structure, data processing and error surface reconstruction are also discussed. Through the use of the novel profilometer, a non- symmetric off-axis mirror with 600 millimeter in diameter can be measured with accuracy of 4 microns Peak to Valley (PV) within 40 minutes, including data processing time.

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Quandou Wang, Zhongyu Zhang, Xuejun Zhang, and Jingchi Yu "Novel profilometer with dual digital length gauge for large aspheric measurements", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402789

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