Translator Disclaimer
6 October 2000 Phase-shifting scatterplate interferometer
Author Affiliations +
Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000)
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
The advantages of common path interferometers for reducing effects of vibrations are well known. A scatterplate interferometer is one common-path interferometer that is well suited for the testing of large concave mirrors, however due to the common path characteristics it is difficult to perform phase-shifting. This paper describes a phase-shifting scatterplate interferometer where the phase-shifting is achieved by making use of the polarization characteristics of a birefringent scatterplate. The major advantage of this design is that it does not require any optical components to be placed near the surface under test. The theory of the interferometer is presented and experimental results are shown.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael B. North Morris and James C. Wyant "Phase-shifting scatterplate interferometer", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000);


Vibration insensitive interferometry
Proceedings of SPIE (November 20 2017)
Birefringent scatterplate phase-shifting interferometer
Proceedings of SPIE (July 18 1999)
Advances in interferometric metrology
Proceedings of SPIE (September 19 2002)

Back to Top