6 October 2000 Process technology for supersmooth surface machining
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Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402794
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China
People usually take the machining of elements with super- smooth surfaces just as a polishing process. But occasionally super-smooth polishing cannot be accomplished even conducted under a succeeded polishing procedure, resulting in the failure of obtaining super-smooth surfaces repeatedly. A concept of super-smooth surfaces machining 'process technology' is proposed which takes super-smooth surfaces machining as a system in general, not merely a polishing process. We take the machining of super-smooth surfaces as a chain consisted of some key nodes. The failure at any node will result in the failure of the final surfaces. The nodes in the process technology system refer to a series of key sub- items, such as sample material selection, pre-machining, and super-smooth surface evaluation, et al. With the aid of polishing experiments, the effects of some key sub-items are discussed.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Honggang Gao, Honggang Gao, Jianlin Cao, Jianlin Cao, Mingen Wu, Mingen Wu, Yong Zhu, Yong Zhu, Changtian Chen, Changtian Chen, "Process technology for supersmooth surface machining", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); doi: 10.1117/12.402794; https://doi.org/10.1117/12.402794

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