Spatial frequency compensation in manufacturing of micro-optic elements

Hongjun Zeng; Bo Chen; Lurong Guo; Chunlei Du; Huimin Tao

doi:10.1117/12.402776

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6 October 2000 Spatial frequency compensation in manufacturing of micro-optic elements

Hongjun Zeng, Bo Chen, Lurong Guo, Chunlei Du, Huimin Tao

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Proceedings Volume 4231, Advanced Optical Manufacturing and Testing Technology 2000; (2000) https://doi.org/10.1117/12.402776
Event: International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, 2000, Chengdu, China

Abstract

The high frequency compensation of the array micro-optical elements (MOE) is presented in this paper. The authors analyzed the spatial frequency loss of the profiles of the elements by Fourier series at first, and give the compensation scheme in the mask moving (M2) project exposing system. The blazed grating is discussed as an example with the smart mask design and element fabrication. As a result, the transitions of the 5 micrometer blazed gratings were cut down from 1.58 μm to 1.29 μm.

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Hongjun Zeng, Bo Chen, Lurong Guo, Chunlei Du, and Huimin Tao "Spatial frequency compensation in manufacturing of micro-optic elements", Proc. SPIE 4231, Advanced Optical Manufacturing and Testing Technology 2000, (6 October 2000); https://doi.org/10.1117/12.402776

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