Deposition of c-axis oriented AIN films by rf magnetron sputtering for surface acoustic wave

Chien-Chuan Cheng; Kuo-Sheng Kao; Ying-Chung Chen

doi:10.1117/12.424424

6 April 2001 Deposition of c-axis oriented AIN films by rf magnetron sputtering for surface acoustic wave

Chien-Chuan Cheng, Kuo-Sheng Kao, Ying-Chung Chen

Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424424
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

C-axis oriented aluminum nitride (AlN) films were deposited on SiO₂ coated Si substrates by reactive rf magnetron sputtering. Growth behaviors of the AlN films deposited at various deposition conditions such as rf power, sputtering pressure, nitrogen concentration and substrate temperature were investigated. Highly c-axis oriented AlN films were identified at substrate temperatures as low as 250 degrees Celsius. A densely pebble-like surface texture of c-axis oriented AlN films with an average grain size of about 100 nm was observed by scanning electron microscopy (SEM). The surface acoustic wave (SAW) characteristics with an interdigital transducer/AlN/SiO₂/Si structure were studied. The phase velocity and the insertion loss measured by a network analyzer were 6080 m/sec and -24.8 dB, respectively.

Citation Download Citation

Chien-Chuan Cheng, Kuo-Sheng Kao, and Ying-Chung Chen "Deposition of c-axis oriented AIN films by rf magnetron sputtering for surface acoustic wave", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424424

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available