Paper
6 April 2001 NiTi shape memory alloy thin film based microgripper
Jun Ping Tan, Weiming Huang, Xiangyang Gao, Joon Hock Yeo, Jianmin Miao
Author Affiliations +
Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424396
Event: Smart Materials and MEMS, 2000, Melbourne, Australia
Abstract
In this paper, we present a way to fabricate microgripper that could well meet the industry needs, i.e. low cost, high performance etc. A medium sized microgripper of 1.6 mm in length has been fabricated, tested and simulated. This novel design, with its fabrication process, makes it possible for batch production, which results in lower production cost. Its low cost has unique advantages in both medical and manufacturing industries. For example, in the medical field, the microgripper could be disposed after every use, much like a syringe without imposing excessive costs. Our finite element simulation agrees reasonably well with the measured behavior.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun Ping Tan, Weiming Huang, Xiangyang Gao, Joon Hock Yeo, and Jianmin Miao "NiTi shape memory alloy thin film based microgripper", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424396
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Cited by 5 scholarly publications.
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KEYWORDS
Silicon

Thin films

Promethium

Silicon films

Shape memory alloys

Optical simulations

Actuators

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