6 April 2001 Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO3 thin film detectors
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Abstract
High-performance pyroelectric infrared (IR) detectors have been fabricated without the back side etching process using Mg-modified lead titanate (Pb1-xMgxTiO3) thin films. PMT thin films were deposited on (111)-oriented Pt thin film on SiO2/Si(100) substrates by a diol-based sol-gel process. The randomly oriented PMT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. The pyroelectric characteristics of point detector with various Mg contents as a function of modulation frequency are compared. It was found that the PMT(6) thin film detector has a large voltage responsivity of 5280 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 5.12 X 107 cmHz1/2/W. The results showed that Pb1-xMgxTiO3 thin film with x equals 0.06 [PMT(6)] was most suitable for use as a pyroelectric IR detector.
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Ying-Chung Chen, Ying-Chung Chen, Chih-Ming Wang, Chih-Ming Wang, Ming-Cheng Kao, Ming-Cheng Kao, Yun-Hsing Lai, Yun-Hsing Lai, } "Pyroelectric properties of sol-gel-derived (Pb,Mg)TiO3 thin film detectors", Proc. SPIE 4234, Smart Materials, (6 April 2001); doi: 10.1117/12.424422; https://doi.org/10.1117/12.424422
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