21 March 2001 Magnetic MEMS used in smart structures which exploit magnetic materials properties
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Abstract
Magnetic MEMS technology, by exploiting the special properties of magnetic materials, offers many challenging possibilities for useful device development in the future. In this paper we explore some of the magnetic materials used in MEMS devices, and methods of fabricating them. Some of the key design issues are briefly addressed and applications of this technology to electromagnetic devices developed at RMIT and to thermally controlled magnetic devices, which are of increasing interest, are examined.
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Ronald B. Zmood, Ronald B. Zmood, LiJiang Qin, LiJiang Qin, Dinesh K. Sood, Dinesh K. Sood, Thurai Vinay, Thurai Vinay, D. Meyrick, D. Meyrick, } "Magnetic MEMS used in smart structures which exploit magnetic materials properties", Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); doi: 10.1117/12.420856; https://doi.org/10.1117/12.420856
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