21 March 2001 New differential-type SMA actuator for a miniature silicon gripper
Author Affiliations +
Abstract
This paper presents two new designs for a differential-type SMA actuator for a silicon micro gripper. The basic structure of the micro gripper is fabricated by silicon dry etching. The SMA actuators have been realized by machining a NiTi foil with a thickness of 50 ?m. It has been cut by direct laserwriting using a Q-switched Nd:YAG-laser followed by a wet chemical etch step to remove the heat affected zone (HAT). The first design is an advance of a recently presented actuation system with an optimized configuration of the SMA actuator. A critical aspect is the high force necessary to imply the low temperature shape of the inactive actuator which has to be transmitted by the gripper gear. This problem has been overcome by the second design where these high forces are transmitted directly between the active and the inactive actuator of the differential-type actuator. Tests of this new actuator and a new gipper design modified to meet the requirements of the actuator are described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sebastian Buetefisch, Stephanus Buettgenbach, "New differential-type SMA actuator for a miniature silicon gripper", Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); doi: 10.1117/12.420896; https://doi.org/10.1117/12.420896
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Microvalve for SMA-based CHAD
Proceedings of SPIE (July 22 2003)
Reshaping technique for MOEM system fabrication
Proceedings of SPIE (September 02 1998)
Probe-type microforce sensor for microactuators
Proceedings of SPIE (September 01 1998)
Recent trends in silicon micromachining technology
Proceedings of SPIE (September 13 1995)
Robust microvalves for hydraulic actuators
Proceedings of SPIE (January 16 2003)

Back to Top