21 March 2001 Novel fabrication technique for development of polymer-based microsensor arrays for molecular diagnostics
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Abstract
An innovative production technique is described for the low-cost production of arrays of interdigitated electrode (IDE) structures. The resulting polymer chips form the basis of a new type of diagnostic device allowing for the impedimetric detection of either hybridisation or immuno-affinity binding of antibody-antigen combinations. Sensitivity of the IDEs is maximised by focusing the field of sensitivity to the molecules of interest by lowering the electrode dimensions and spacing to the sub-micron region. This has been achieved using a unique combination of state-of-the-art micro-structuring of polymers and the directionality of metal-deposition by evaporation. Subsequently, polymer based arrays of IDEs with micron to sub-micron electrode widths can be realised using a single metallisation step, completely omitting any sophisticated photolithography.
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Paul Jacobs, Paul Jacobs, Walter Hofer, Walter Hofer, Rudi Rossau, Rudi Rossau, Wim Tachelet, Wim Tachelet, Andrew Campitelli, Andrew Campitelli, Peter Detemple, Peter Detemple, Jeff Newman, Jeff Newman, Chris Flack, Chris Flack, Andre Van de Voorde, Andre Van de Voorde, } "Novel fabrication technique for development of polymer-based microsensor arrays for molecular diagnostics", Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); doi: 10.1117/12.420851; https://doi.org/10.1117/12.420851
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