Paper
16 March 2001 Application of MEMS in microwave and millimeter wave systems
Author Affiliations +
Proceedings Volume 4236, Smart Electronics and MEMS II; (2001) https://doi.org/10.1117/12.418756
Event: Smart Materials and MEMS, 2000, Melbourne, Australia
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© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay K. Varadan, K. J. Vinoy, Hargsoon Yoon, K. A. Jose, and Vasundara V. Varadan "Application of MEMS in microwave and millimeter wave systems", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); https://doi.org/10.1117/12.418756
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Cited by 4 scholarly publications.
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KEYWORDS
Extremely high frequency

Microelectromechanical systems

Microwave radiation

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