16 March 2001 Cylindrical and conical electrostatic wobble micromotors
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Abstract
This paper describes the analysis, design, construction and testing of two electrostatic wobble micromotors; a conventional cylindrical design and a new conical design. Both designs have stators with eight segments. The cylindrical micromotor rotor is about 4mm in diameter and 20mm long while the conical rotor has a maximum diameter of about 10mm and is 12mm long. The advantage of the new conical design is that it eliminates the need for a pivot and hence substantially reduces the size of the motor. A detailed theoretical analysis of the designs is shown and compared with experimental results. The micromotors are operated under open-loop control and the rotation of the rotor was tested at an applied voltage of up to 500V.
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Tony Sarros, Tony Sarros, Eng C. Chew, Eng C. Chew, Simon Crase, Simon Crase, Boon Kain Tay, Boon Kain Tay, Wen L. Soong, Wen L. Soong, } "Cylindrical and conical electrostatic wobble micromotors", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418767; https://doi.org/10.1117/12.418767
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