16 March 2001 Electroplated microneedle array for biomedical applications
Author Affiliations +
Proceedings Volume 4236, Smart Electronics and MEMS II; (2001); doi: 10.1117/12.418774
Event: Smart Materials and MEMS, 2000, Melbourne, Australia
Abstract
NiICo microneedle arrays, which are fabricated by conventional near UV lithography and chemical electroplating process on a silicon wafer, are reported here. These metallic microneedles with annular structure could be easily incorporated with micropump for drug delivery and in-situ physiological fluid sampling. The mechanical strength inherent in the alloy provides excellent durability for the needles to sustain in process and clinic test.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kuo Kang Liu, Z. H. Du, F. G. Tseng, Min-Chieh Chou, J. Y. Fang, C. C. Chieng, "Electroplated microneedle array for biomedical applications", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418774; http://dx.doi.org/10.1117/12.418774
PROCEEDINGS
5 PAGES


SHARE
KEYWORDS
Biomedical optics

Microfluidics

Skin

Tissues

Electroplating

Silicon

Lithography

Back to Top