16 March 2001 Electroplated microneedle array for biomedical applications
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Abstract
NiICo microneedle arrays, which are fabricated by conventional near UV lithography and chemical electroplating process on a silicon wafer, are reported here. These metallic microneedles with annular structure could be easily incorporated with micropump for drug delivery and in-situ physiological fluid sampling. The mechanical strength inherent in the alloy provides excellent durability for the needles to sustain in process and clinic test.
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Kuo Kang Liu, Z. H. Du, F. G. Tseng, Min-Chieh Chou, J. Y. Fang, C. C. Chieng, "Electroplated microneedle array for biomedical applications", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418774; https://doi.org/10.1117/12.418774
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