16 March 2001 Electroplated microneedle array for biomedical applications
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Abstract
NiICo microneedle arrays, which are fabricated by conventional near UV lithography and chemical electroplating process on a silicon wafer, are reported here. These metallic microneedles with annular structure could be easily incorporated with micropump for drug delivery and in-situ physiological fluid sampling. The mechanical strength inherent in the alloy provides excellent durability for the needles to sustain in process and clinic test.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kuo Kang Liu, Kuo Kang Liu, Z. H. Du, Z. H. Du, F. G. Tseng, F. G. Tseng, Min-Chieh Chou, Min-Chieh Chou, J. Y. Fang, J. Y. Fang, C. C. Chieng, C. C. Chieng, } "Electroplated microneedle array for biomedical applications", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418774; https://doi.org/10.1117/12.418774
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