2 November 2000 Laser systems for generation of x-ray radiation
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Laser-produced plasma is an efficient source of x-ray radiation and has been widely used in science and technology. As a result of rapid development of x-ray optics during the last decades a significant increase in x-ray applications has been observed. In the paper we have described conditions of efficient generation of x-ray radiation from laser-produced plasma. These conditions determine characteristics of laser radiation to be used for plasma creation. We have discussed parameters of laser systems used for x-ray generation with respect to applications in lithography and microscopy. We have presented selected laser systems, which have been used for generation of non-coherent and coherent x-ray radiation.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miroslaw Szczurek, Miroslaw Szczurek, Andrzej Bartnik, Andrzej Bartnik, Henryk Fiedorowicz, Henryk Fiedorowicz, Roman Jarocki, Roman Jarocki, Jerzy Kostecki, Jerzy Kostecki, } "Laser systems for generation of x-ray radiation", Proc. SPIE 4238, Laser Technology VI: Applications, (2 November 2000); doi: 10.1117/12.405996; https://doi.org/10.1117/12.405996


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