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29 June 2001 Laser fabrication and assembly processes for MEMS
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Abstract
This paper discusses the use of high power lasers in the manufacture of microelectromechanical systems (MEMS). The ability to process a wide range of materials, and to produce truly three-dimensional structures with tolerances at the micron or sub-micron level, give laser micromachining some key advantages over other more established micromachining techniques. Previous work in this area is reviewed, covering the following topics: use of ablation in the direct fabrication of MEMS devices and to define polymer masters for subsequent replication by electroforming and moulding (the so-called Laser-LIGA process); laser-assisted deposition and etching on planar and non-planar surfaces; laser-assisted manipulation of microparts and laser-assisted assembly.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew S. Holmes "Laser fabrication and assembly processes for MEMS", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432522; https://doi.org/10.1117/12.432522
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