29 June 2001 Laser micromachining: new techniques and developments for display applications
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Abstract
The area of display devices has experienced extremely rapid growth in recent years and these advances show no sign of declining. One of the major developments in this field has been the use of lasers for various microfabrication tasks. This paper describes some techniques which have been developed using excimer lasers for the production of novel microstructures in polymer materials. Examples of the types of microstructures which are produced are presented and their applicability for display device applications is outlined. Forthcoming developments in the laser manufacture of displays are discussed.
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Nadeem Hasan Rizvi, Jako Greuters, Jason Dallimore, Keren Hamilton, Robin Clabburn, Bran Ebsworth, "Laser micromachining: new techniques and developments for display applications", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432519; https://doi.org/10.1117/12.432519
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