29 June 2001 Microstereolithography and its application to biochemical IC chip
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Abstract
The world's first micro stereo lithography, named IH process, was proposed and developed by the speaker in 1992. By now, several types of micro stereo lithography systems have been developed. Three-dimensional resolution of solidification has reached to 0.2 micron at present. These 3D micro fabrication processes using UV curable polymer gave a big impact on not only MEMS but also optics. The latest version of IH process enables us to make a movable micro mechanism without assemble process or sacrificial layer technique often used in silicon process. It is well known that the IH process is the mother of two-photon micro stereo lithography and its applications. Recently new micro chemical device named Biochemical IC Chip was proposed and developed by the speaker. This chip is based on the module IC chip-set like today's TTL family. IH process enable to make the biochemical IC including real three-dimensional micro fluid channels. Various kinds of Biochemical IC chips such as micro pump, switching valve, reactor, concentrator and detector have already been fabricated successfully. Basic performance of micro chemical devices constructed by the biochemical IC chips were demonstrated. The biochemical IC chips will open new bioscience and medicine based on innovative technology.
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Koji Ikuta, Shoji Maruo, Tadahiro Hasegawa, Takao Adachi, "Microstereolithography and its application to biochemical IC chip", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432529; https://doi.org/10.1117/12.432529
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