29 June 2001 Submicron structuring of solid targets with femtosecond laser pulses
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Abstract
Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.
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Frank Korte, Stefan Nolte, Boris N. Chichkov, Carsten Fallnich, Andreas Tuennermann, Herbert Welling, "Submicron structuring of solid targets with femtosecond laser pulses", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432502; https://doi.org/10.1117/12.432502
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