Submicron structuring of solid targets with femtosecond laser pulses

Frank Korte; Stefan Nolte; Boris N. Chichkov; Carsten Fallnich; Andreas Tuennermann; Herbert Welling

doi:10.1117/12.432502

29 June 2001 Submicron structuring of solid targets with femtosecond laser pulses

Frank Korte; Stefan Nolte; Boris N. Chichkov; Carsten Fallnich; Andreas Tuennermann; Herbert Welling

Author Affiliations +

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432502
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.

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Frank Korte, Frank Korte, Stefan Nolte, Stefan Nolte, Boris N. Chichkov, Boris N. Chichkov, Carsten Fallnich, Carsten Fallnich, Andreas Tuennermann, Andreas Tuennermann, Herbert Welling, Herbert Welling, } "Submicron structuring of solid targets with femtosecond laser pulses", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432502; https://doi.org/10.1117/12.432502

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