29 June 2001 Submicron structuring of solid targets with femtosecond laser pulses
Author Affiliations +
Possibilities to fabricate sub-micron structures in thin metal films, metal coatings, and glass substrates using femtosecond laser pulses are systematically studied. Structures are produced by direct femtosecond-pulse laser ablation of solid targets at atmospheric pressure. Tight focusing and imaging techniques are applied. Dependencies of the structure size on laser pulse energy and pulse number are investigated.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frank Korte, Frank Korte, Stefan Nolte, Stefan Nolte, Boris N. Chichkov, Boris N. Chichkov, Carsten Fallnich, Carsten Fallnich, Andreas Tuennermann, Andreas Tuennermann, Herbert Welling, Herbert Welling, } "Submicron structuring of solid targets with femtosecond laser pulses", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432502; https://doi.org/10.1117/12.432502

Back to Top