29 June 2001 Surface modification of aluminum alloy 2024-T3 via femtosecond pulse laser irradiation
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Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001); doi: 10.1117/12.432551
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States
Abstract
Surface modification of aluminum alloy 2024-T3 using femtosecond pulsed excimer laser irradiation was studied at 248 nm. The images of the scanning electron microscopy (SEM) were characterized as a function of incident laser fluence. Results indicated that the surface features, ranging from nano- to microdimension, can be developed through variation in laser fluence intensities and pulse counts. Two ablation regimes in the logarithmic fluence dependence of the ablated depth for the 500 fs-pulse irradiation were observed. The theoretical analysis for ablation processes is in a good agreement with the experimental results.
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Kai Dou, Robert L. Parkhill, Kenneth H. Church, Edward T. Knobbe, "Surface modification of aluminum alloy 2024-T3 via femtosecond pulse laser irradiation", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432551; https://doi.org/10.1117/12.432551
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KEYWORDS
Laser ablation

Pulsed laser operation

Metals

Aluminum

Electrons

Femtosecond phenomena

Laser irradiation

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