5 June 2001 Absolute shape control of microcomponents using digital holography and multiwavelength contouring
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Proceedings Volume 4275, Metrology-based Control for Micro-Manufacturing; (2001) https://doi.org/10.1117/12.429350
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States
Digital Holography makes it possible to reconstruct the phase distribution of wavefields directly. By application of interferometric technics the observed interference phase contains the information about the shape of the object under test and/or its deformation after loading. These data can be used to investigate the materials' behavior of microcomponents. However, the observed mod2(pi) -interference phase must be unwrapped and the absolute phase values have to be transformed into 3D-coordinates and displacement components. To this purpose a multi-wavelength procedure was developed that avoids the complicated spatial unwrapping procedure. Moreover an adapted calibration technique is used to calculate the metrological data from the distorted phase field. In combination with special loading techniques and physical models of the loading behavior of components with beam geometry some important material parameters such as the Young's modulus, the Poisson ratio and the thermal expansion coefficient of microcomponents can be measured. The paper describes the measuring technology and shows some examples of microcomponent testing.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wolfgang Osten, Wolfgang Osten, Soenke Seebacher, Soenke Seebacher, Torsten Baumbach, Torsten Baumbach, Werner P. O. Jueptner, Werner P. O. Jueptner, } "Absolute shape control of microcomponents using digital holography and multiwavelength contouring", Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); doi: 10.1117/12.429350; https://doi.org/10.1117/12.429350

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