Desktop x-ray microtomography

Alexander Sasov; Tom Ceulemans; Dirk Van Dyck

doi:10.1117/12.429357

5 June 2001 Desktop x-ray microtomography

Alexander Sasov, Tom Ceulemans, Dirk Van Dyck

Author Affiliations +

Proceedings Volume 4275, Metrology-based Control for Micro-Manufacturing; (2001) https://doi.org/10.1117/12.429357
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

An X-ray microtomography (or micro-CT) is an instrument for high-resolution 3D reconstruction of objects internal microstructure without destruction or time consuming specimen preparation. By using modern technology in x-ray sources and detectors several micro-CT systems were created as a simply usable desktop instrument. First micro-CT system is a laboratory instrument, giving true spatial resolution over a ten million times more detailed (in the term of volume parts) than the medical CT-scanners. The instrument contains a sealed microfocus X-ray source, a cooled X-ray digital CCD-camera and a Dual Pentium computer for system control and 3D-reconstructions running under Windows NT.

Citation Download Citation

Alexander Sasov, Alexander Sasov, Tom Ceulemans, Tom Ceulemans, Dirk Van Dyck, Dirk Van Dyck, } "Desktop x-ray microtomography", Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); doi: 10.1117/12.429357; https://doi.org/10.1117/12.429357

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