29 May 2001 Novel techniques for microscopic imaging of semiconductor surfaces
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Abstract
We develop several new optical techniques for microscopic semiconductor diagnostics and use them for inspection of semiconductor surfaces. Short-pulse lasers (femtosecond Ti:sapphire and Cr4+:forsterite) are used for nonlinear optical studies.
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Vladislav V. Yakovlev, Vladislav V. Yakovlev, Katerina Mikhailichenko, Katerina Mikhailichenko, Sergei V. Govorkov, Sergei V. Govorkov, "Novel techniques for microscopic imaging of semiconductor surfaces", Proc. SPIE 4276, Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics, (29 May 2001); doi: 10.1117/12.428011; https://doi.org/10.1117/12.428011
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