Application of microsandblast machining to LiNbO3 wafer surface for broadband modulators

Futoshi Yamamoto; Yuji Yamane; Naoki Mitsugi; Masataka Yokosawa; Hirotoshi Nagata

doi:10.1117/12.426815

15 May 2001 Application of microsandblast machining to LiNbO₃ wafer surface for broadband modulators

Futoshi Yamamoto, Yuji Yamane, Naoki Mitsugi, Masataka Yokosawa, Hirotoshi Nagata

Proceedings Volume 4277, Integrated Optics Devices V; (2001) https://doi.org/10.1117/12.426815
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

Machining technology for LiNbO₃ (LN) wafer surface aiming a mass-production of broadband LN modulators is investigated. Although several manufacturers commercially supply 40G LN modulators, there are many difficulties in mass-production of such broadband LN modulators. For instance, in order to realize sufficiently broadened bandwidth performance, machining of LN wafer surfaces is necessary as demonstrated by ridge-waveguide modulators and devices using very-thin substrates. We focus the study on the machining technology of LN wafers applicable to mass- production based on micro-sandblast techniques. In order to demonstrate effectiveness of the micro-sandblast, 40G LN modulators designed to have a partially thinned substrate along RF-electrodes are experimentally fabricated.

Citation Download Citation

Futoshi Yamamoto, Yuji Yamane, Naoki Mitsugi, Masataka Yokosawa, and Hirotoshi Nagata "Application of microsandblast machining to LiNbO₃ wafer surface for broadband modulators", Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); https://doi.org/10.1117/12.426815

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