15 May 2001 Chalcogenide three-dimensional photonic structures
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Proceedings Volume 4277, Integrated Optics Devices V; (2001) https://doi.org/10.1117/12.426829
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States
Abstract
AsSeTe/AsSe chalcogenide glasses are photosensitive materials with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of 3D photonic crystals, composed from AsSeTe and air, with sub-micron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. I. Feigel, Zvi Kotler, Bruno Sfez, A. Arsh, Matvei Klebanov, Victor Lyubin, "Chalcogenide three-dimensional photonic structures", Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); doi: 10.1117/12.426829; https://doi.org/10.1117/12.426829
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