15 May 2001 Development of a fabrication process for plastic optical modules with nano-3D structures for communication
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Proceedings Volume 4277, Integrated Optics Devices V; (2001) https://doi.org/10.1117/12.426827
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States
In recent years, the demand for the high efficiency diffractive optical element is booming for large capacity storage devices. Instead of conventional lithographic approach to fabricate molds, we have developed a new technology utilizing an electron beam writer in order to produce molds used for injection modeling high-accuracy diffractive optical elements. Although we have already developed a technology to produce plastic diffractive elements, with the new technology we can produce blazed and relief features, which are not achievable through the conventional approach. By introducing a mathematical expression to give exact dosage necessary for particular depth from 0.7 to 1.3 micron ad from 1.5 to 5.0 microns pitch, high-accuracy nano-3D features can be controlled within +/- 50 nm in pitch and +/- 35 nm in depth. This blazed structure was designed to achieve 41 percent identical 0th and first order and the result is 39.0 percent for 0th and 37.9 percent for first order at 780 nm.
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Seiichiro Kitagawa, Seiichiro Kitagawa, Yoichi Kotani, Yoichi Kotani, Makoto Okada, Makoto Okada, Kazuya Yamamoto, Kazuya Yamamoto, } "Development of a fabrication process for plastic optical modules with nano-3D structures for communication", Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); doi: 10.1117/12.426827; https://doi.org/10.1117/12.426827

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