In this paper, a new integrated programmable diffractive optical element is described, which i8s composed by stacking of the plasma wave optical modulator/switch structure. This structure has the possibility of high density integration by means of the state-of-the-art fabrication technologies. The device has the in-design capability to be either programmed electrically or optically. Both the optical and electrical programming require transverse Dc biases across the waveguide modulators. Programming time in both approaches could be as low as 10ps. As proposed in the paper, the device has numerous applications in different areas including decision making, pattern recognition, high density optical shortages, programmable gratings and holograms, and optical computing.