Remote vapor phase processing of organic semiconductors for optoelectronic applications

Sumant Padiyar; Li Chen; Harry Efsthadiatis; Robert E. Geer

doi:10.1117/12.429374

15 June 2001 Remote vapor phase processing of organic semiconductors for optoelectronic applications

Sumant Padiyar, Li Chen, Harry Efsthadiatis, Robert E. Geer

Proceedings Volume 4279, Organic Photonic Materials and Devices III; (2001) https://doi.org/10.1117/12.429374
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

Commercial application of organic light-emitting materials currently employs organic thin film deposition techniques including spin-coating, dip-coating, and evaporation. Broader technologies will also benefit from such organic optoelectronic materials. Emerging applications include on- chip light sources for integrated circuit (IC) optical signal transduction, on-chip microdisplays, and on-chip visible and infrared sources for integrated microsystems (MEMS). However, to fully adapt to the so-called cluster tool platform used for closed-loop manufacturing of IC's a remote vapor phase deposition scheme is required for low molecular weight organic light-emitting materials as opposed to conventional evaporation based techniques. We report the development of a remote organic vapor phase deposition process for growing high-quality aluminum tris-hydroxyquinoline (Alq₃) films. This process utilizes a remote reservoir for organic vaporization coupled with mass-flow controllers for delivery to the condensation zone. A load-lock equipped chamber, capable of 5' wafer transfer, is utilized to eliminate ambient contamination without restricting wafer loading/unloading or Alq₃ material loading. Data will be presented for a design-of-experiment (DOE) statistical process optimization investigation of Alq₃ thin film growth as a function of the system deposition parameters. Electrical characterization of the Alq₃ films and their applicability for optoelectronic device structures are presented and discussed.

Citation Download Citation

Sumant Padiyar, Li Chen, Harry Efsthadiatis, and Robert E. Geer "Remote vapor phase processing of organic semiconductors for optoelectronic applications", Proc. SPIE 4279, Organic Photonic Materials and Devices III, (15 June 2001); https://doi.org/10.1117/12.429374

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