Art and practice to emboss gratings into sol-gel waveguides

Istvan Szendro

doi:10.1117/12.426859

15 May 2001 Art and practice to emboss gratings into sol-gel waveguides

Istvan Szendro

Proceedings Volume 4284, Functional Integration of Opto-Electro-Mechanical Devices and Systems; (2001) https://doi.org/10.1117/12.426859
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

Recent interest in optical sensors, especially optical biosensors, has led to the introduction of commercially available instrumentation and sensor schemes for label free, real time monitoring of intermolecular interactions. One of the promising optical structure is the grating coupler planar waveguide sensor, where high precision surface relief grating is used and a low cost manufacturing is needed. A practical method to mass-produce gratings with limited lateral dimension is to emboss master grating into a sol-gel waveguide film. With proper optimization of the sol-gel process, a wide time window is available to perform embossing and highly reproducible, cost effective grating structures can be replicated. In our practice SiO₂, TiO₂, SiO₂/TiO₂, Ta₂O₅ and a mixture of these sol-gel thin films are proved to be good candidates for low optical loss waveguide materials in which grating with 2400 line/mm periodicity could be directly embossed. The relatively wide time window for optimal embossing opens the possibility to develop grating structures with more than one grating. Producing multiple gratings separated laterally and/or vertically from each other is demonstrated.

Citation Download Citation

Istvan Szendro "Art and practice to emboss gratings into sol-gel waveguides", Proc. SPIE 4284, Functional Integration of Opto-Electro-Mechanical Devices and Systems, (15 May 2001); https://doi.org/10.1117/12.426859

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available