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15 May 2001 New method to fabricate 3D optical structures into glass-ceramic films
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Abstract
Liquid phase deposition of sol-gel method derived hybrid glass materials is utilized for fabrication of UV light deformable thin films. The hybrid glass material undergoes a surface-relief deformation when exposed to UV light. The observed deformation phenomenon is in the form of a physical expansion of the exposed areas. The maximum deformation when the material was patterned as a sinusoidal grating was 643 nm. The hybrid glass material features an index of refraction of 1.52, rms surface roughness of 2.25 +/- 0.83 nm after processing, and extinction coefficients of 1.2 10-3 micrometers -1 and 0.47 10-3 micrometers -1 at wavelengths of 633 nm and 1550 nm, respectively.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juha T. Rantala, Ari H. O. Kaerkkaeinen, Jussi A. Hiltunen, Terho K. Kololuoma, and Michael R. Descour "New method to fabricate 3D optical structures into glass-ceramic films", Proc. SPIE 4284, Functional Integration of Opto-Electro-Mechanical Devices and Systems, (15 May 2001); https://doi.org/10.1117/12.426858
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