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30 May 2001 Polymer-based board-level optoelectronic interconnects via micromirror coupler
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Proceedings Volume 4292, Optoelectronic Interconnects VIII; (2001) https://doi.org/10.1117/12.428024
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States
Abstract
We report the design and formation of a high-performance polymer waveguide array with 45-degree micro-mirror couplers for achieving fully-embedded board-level optoelectronic interconnects. We have used Si CMOS process compatible polymer as the fabrication material, which is relatively easy to process and has low propagation loss at 850 nm wavelength. 45-degree total interior reflection micro-mirror couplers fabricated within the channel waveguides provide surface-normal light coupling between the waveguide and the optoelectronic devices, thus forming a fully-embedded 3D optoelectronic interconnect. We have demonstrated a hybrid optoelectronic integrated system of GaAs MSM photodetector array and polymer channel waveguide array with 45-degree micro-mirror couplers, showing an aggregate 3 dB bandwidth of 32 GHz.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yujie Liu, Lei Lin, Chulchae Choi, Bipin Bihari, and Ray T. Chen "Polymer-based board-level optoelectronic interconnects via micromirror coupler", Proc. SPIE 4292, Optoelectronic Interconnects VIII, (30 May 2001); https://doi.org/10.1117/12.428024
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