Thin film polymeric waveguide beam deflector based on thermo-optic effect

Chiou-Hung Jang; Lin Sun; Jin-ha Kim; Suning Tang; Bulang Li; Xinghua Han; Xuejun Lu; John Martin Taboada; Dechang An; Qingjun Zuo; Ray T. Chen

doi:10.1117/12.428025

30 May 2001 Thin film polymeric waveguide beam deflector based on thermo-optic effect

Chiou-Hung Jang, Lin Sun, Jin-ha Kim, Suning Tang, Bulang Li, Xinghua Han, Xuejun Lu, John Martin Taboada, Dechang An, Qingjun Zuo, Ray T. Chen

Author Affiliations +

Proceedings Volume 4292, Optoelectronic Interconnects VIII; (2001) https://doi.org/10.1117/12.428025
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

In this paper, we demonstrate a thin-film polymeric waveguide beam deflector using a new device concept, an electrode of prism-array pattern on top of a three-layer planar waveguide. The three-layer planar waveguide was composed of UV15 as the top cladding layer, a polyimide as the core layer, and SiO₂ as the bottom cladding layer on a silicon substrate. A gold layer was deposited on the top of the waveguide by e-beam deposition and then patterned into a prism-array as the heating electrode by photolithography.

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Chiou-Hung Jang, Chiou-Hung Jang, Lin Sun, Lin Sun, Jin-ha Kim, Jin-ha Kim, Suning Tang, Suning Tang, Bulang Li, Bulang Li, Xinghua Han, Xinghua Han, Xuejun Lu, Xuejun Lu, John Martin Taboada, John Martin Taboada, Dechang An, Dechang An, Qingjun Zuo, Qingjun Zuo, Ray T. Chen, Ray T. Chen, "Thin film polymeric waveguide beam deflector based on thermo-optic effect", Proc. SPIE 4292, Optoelectronic Interconnects VIII, (30 May 2001); doi: 10.1117/12.428025; https://doi.org/10.1117/12.428025

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