Thin film polymeric waveguide beam deflector based on thermo-optic effect

Chiou-Hung Jang; Lin Sun; Jin-ha Kim; Suning Tang; Bulang Li; Xinghua Han; Xuejun Lu; John Martin Taboada; Dechang An; Qingjun Zuo; Ray T. Chen

doi:10.1117/12.428025

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30 May 2001 Thin film polymeric waveguide beam deflector based on thermo-optic effect

Chiou-Hung Jang, Lin Sun, Jin-ha Kim, Suning Tang, Bulang Li, Xinghua Han, Xuejun Lu, John Martin Taboada, Dechang An, Qingjun Zuo, Ray T. Chen

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Proceedings Volume 4292, Optoelectronic Interconnects VIII; (2001) https://doi.org/10.1117/12.428025
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

In this paper, we demonstrate a thin-film polymeric waveguide beam deflector using a new device concept, an electrode of prism-array pattern on top of a three-layer planar waveguide. The three-layer planar waveguide was composed of UV15 as the top cladding layer, a polyimide as the core layer, and SiO₂ as the bottom cladding layer on a silicon substrate. A gold layer was deposited on the top of the waveguide by e-beam deposition and then patterned into a prism-array as the heating electrode by photolithography.

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Chiou-Hung Jang, Lin Sun, Jin-ha Kim, Suning Tang, Bulang Li, Xinghua Han, Xuejun Lu, John Martin Taboada, Dechang An, Qingjun Zuo, and Ray T. Chen "Thin film polymeric waveguide beam deflector based on thermo-optic effect", Proc. SPIE 4292, Optoelectronic Interconnects VIII, (30 May 2001); https://doi.org/10.1117/12.428025

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